This project was mostly done by Siliang Chang, who is the student of Prof. Christos Takoudis at UIC. Seungbum Hong and Yoon-Young Choi (ANL) provided help with PFM electrical characterization. Serge mostly provided cheerleading support, as he usually does. Congratulations to Siliang again. Here is the link to the paper entitled Atomic layer deposition of environmentally benign SnTiOx as a potential ferroelectric material that is coming out as part of the special issue of Journal of Vacuum Science & Technology A dedicated to ALD growth.